000 | 00384nam a2200145Ia 4500 | ||
---|---|---|---|
008 | 180926s2013 xx 000 0 und d | ||
020 | _a9780070487093 | ||
082 | _a621.381 | ||
100 | _aHsu,Tai Ran | ||
245 | _aMems & Microsystems Design and Manufacture | ||
260 | _c2013 | ||
300 | _aXii+436 | ||
500 | _a& ; and ; Design ; Manufacture ; Mems ; Microsystems | ||
906 | _a27 | ||
999 |
_c332655 _d332655 |